Mechanics and Computation / View source

for MEMS and Nanotechnology for the Automotive Market

<h3>MEMS and Nanotechnology for the Automotive Market <br>
Silicon, Silicon Carbide and Polymer MEMS </h3>
 
Albert (“Al”) P. Pisano, Professor and Chair <br>
Department of Mechanical Engineering <br>
Director, Berkeley Sensor & Actuator Center<br>
FANUC Chair for Mechanical Systems <br>
Professor of Electrical Engineering and Computer Sciences <br>
University of California at Berkeley 
 
In this presentation, recent work in MEMS and Nanotechnology specifically applied to 
automotive sensors will be described.  The presentation begins with a brief review of the 
Berkeley Sensor & Actuator Center, followed by a brief MEMS technology review, and 
then continues with the main topic, automotive sensors using silicon, silicon carbide and 
various plastics and polymers.  An overview of applications of sensors of all kinds for the 
automotive market will be made, including some sensor information from Bosch as well 
as some information about the Japanese market.  Micro strain sensors fabricated in 
silicon will be described, and then an extension of the technology to silicon carbide will 
be discussed.  Recent results showing silicon carbide sensors operating at temperatures 
of 600°C and surviving shocks of 64,000g will be shown.  The use of nanowires as 
automotive sensors (or automotive sensor scaffolding) will be described, followed by 
vision of an integrated sensor set completely in silicon carbide.

Return to MEMS and Nanotechnology for the Automotive Market.

Retrieved from "http://mc.stanford.edu/MEMS_and_Nanotechnology_for_the_Automotive_Market"