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Department of Mechanical Science and Engineering | Department of Mechanical Science and Engineering | ||
University of Illinois at Urbana-Champaign, Urbana, IL 61801, USA | University of Illinois at Urbana-Champaign, Urbana, IL 61801, USA | ||
kjhsia@illinois.edu | kjhsia@illinois.edu | ||
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| + | ===Mechanics of Surface Effects in Nanoscale Device-Making and Manufacturing=== | ||
Nanoscale science and technology has been an important frontier in research and development in the past decade. Miniaturization is the major driving force behind these research activities. As the characteristic dimensions of devices and MEMS/NEMS components become smaller, however, the surface to volume ratio of these components increases significantly. Consequently, many surface phenomena, such as capillary interactions and surface adhesion, become increasingly important. Many scientific issues of these phenomena can be best understood using a mechanics approach. In this talk, I will use two particular case studies to demonstrate that mechanics can indeed be a powerful tool to help understand these phenomena and provide guidance for nanomanufacturing and device-making. One case study considers the self-assembling process of a 3-D photovoltaic device made of thin silicon foil. The other studies the collapse of PDMS contact printing stamps. In both cases, models were developed to help understand the mechanisms controlling the behavior of these processes. Critical parameters emerge naturally from these analyses which can be used to guide the device formation and manufacturing of nanoscale components. | Nanoscale science and technology has been an important frontier in research and development in the past decade. Miniaturization is the major driving force behind these research activities. As the characteristic dimensions of devices and MEMS/NEMS components become smaller, however, the surface to volume ratio of these components increases significantly. Consequently, many surface phenomena, such as capillary interactions and surface adhesion, become increasingly important. Many scientific issues of these phenomena can be best understood using a mechanics approach. In this talk, I will use two particular case studies to demonstrate that mechanics can indeed be a powerful tool to help understand these phenomena and provide guidance for nanomanufacturing and device-making. One case study considers the self-assembling process of a 3-D photovoltaic device made of thin silicon foil. The other studies the collapse of PDMS contact printing stamps. In both cases, models were developed to help understand the mechanisms controlling the behavior of these processes. Critical parameters emerge naturally from these analyses which can be used to guide the device formation and manufacturing of nanoscale components. | ||